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High-sensitivity tunneling magneto-resistive micro-gyroscope with immunity to external magnetic interference
Micro-electro-mechanical system (MEMS) gyroscopes have numerous potential applications including guidance, robotics, tactical-grade navigation, and automotive applications fields. The methods with ability of the weak Coriolis force detection are critical for MEMS gyroscopes. In this paper, we presen...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7536292/ https://www.ncbi.nlm.nih.gov/pubmed/33020557 http://dx.doi.org/10.1038/s41598-020-73369-6 |