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Bottom-up Filling of Damascene Trenches with Gold in a Sulfite Electrolyte
Superconformal Au deposition is demonstrated in a Na(3)Au(SO(3))(2 +) Na(2)SO(3) electrolyte using Bi species to catalyze the reduction of Au(SO(3))(2)(3−). Micromolar additions of Bi(3+) to the sulfite-based electrolyte accelerate the reduction of Au(SO(3))(2)(3−) as shown by hysteretic voltammetry...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7542677/ https://www.ncbi.nlm.nih.gov/pubmed/33041353 |