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Aqueous ionic effect on electrochemical breakdown of Si-dielectric–electrolyte interface
The breakdown of thin dielectric films (SiO(2), Si(3)N(4), HfO(2)) immersed in aqueous electrolyte was investigated. The current and the kinetics of dielectric breakdown caused by large cathodic electric field applied across the dielectric layer reveal the electrochemical nature of dielectric materi...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7544892/ https://www.ncbi.nlm.nih.gov/pubmed/33033305 http://dx.doi.org/10.1038/s41598-020-73880-w |