Modeling of Motion Characteristics and Performance Analysis of an Ultra-Precision Piezoelectric Inchworm Motor

Ultra-precision piezoelectric inchworm motor (PIM) is widely used in the optical equipment, microelectronics semiconductor industry and precision manufacturing for motion and positioning, but the multi-physics field simulation model for estimating PIM performance and assisting motor design is rarely...

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Detalles Bibliográficos
Autores principales: Zhao, Bo, Fang, Ri, Shi, Weijia
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7557391/
https://www.ncbi.nlm.nih.gov/pubmed/32911773
http://dx.doi.org/10.3390/ma13183976

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7557391/
https://www.ncbi.nlm.nih.gov/pubmed/32911773
http://dx.doi.org/10.3390/ma13183976

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