Process Oxygen Flow Influence on the Structural Properties of Thin Films Obtained by Co-Sputtering of (TeO(2))(x)-ZnO and Au onto Si Substrates

In this study, we investigated the structural properties of TeO(2)-ZnO (TZ) and TeO(2)-ZnO-Au (TZA) thin films sputtered under different oxygen concentrations and either annealed or not annealed at 325 °C in air for 10 or 20 h. The lattice changes of the tellurium oxide were shown to be inherent in...

Descripción completa

Detalles Bibliográficos
Autores principales: Bontempo, Leonardo, dos Santos Filho, Sebastião G., Kassab, Luciana R. P.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7557641/
https://www.ncbi.nlm.nih.gov/pubmed/32957593
http://dx.doi.org/10.3390/nano10091863

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7557641/
https://www.ncbi.nlm.nih.gov/pubmed/32957593
http://dx.doi.org/10.3390/nano10091863

Ejemplares similares