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Process Oxygen Flow Influence on the Structural Properties of Thin Films Obtained by Co-Sputtering of (TeO(2))(x)-ZnO and Au onto Si Substrates
In this study, we investigated the structural properties of TeO(2)-ZnO (TZ) and TeO(2)-ZnO-Au (TZA) thin films sputtered under different oxygen concentrations and either annealed or not annealed at 325 °C in air for 10 or 20 h. The lattice changes of the tellurium oxide were shown to be inherent in...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7557641/ https://www.ncbi.nlm.nih.gov/pubmed/32957593 http://dx.doi.org/10.3390/nano10091863 |