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Tunable Optical Properties of Amorphous-Like Ga(2)O(3) Thin Films Deposited by Electron-Beam Evaporation with Varying Oxygen Partial Pressures
Ga(2)O(3) thin films were fabricated by the electron-beam evaporation technique at a varying oxygen partial pressure from 0 to 2.0 × 10(−2) Pa. The effect of oxygen partial pressure on the crystalline structure and optical properties of the Ga(2)O(3) films was analyzed using sophisticated techniques...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7558287/ https://www.ncbi.nlm.nih.gov/pubmed/32899985 http://dx.doi.org/10.3390/nano10091760 |