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Progresses in Synthesis and Application of SiC Films: From CVD to ALD and from MEMS to NEMS
A search of the recent literature reveals that there is a continuous growth of scientific publications on the development of chemical vapor deposition (CVD) processes for silicon carbide (SiC) films and their promising applications in micro- and nanoelectromechanical systems (MEMS/NEMS) devices. In...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2020
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7570321/ https://www.ncbi.nlm.nih.gov/pubmed/32846964 http://dx.doi.org/10.3390/mi11090799 |