Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope

This paper presents microfabrication process-driven design of a multi-degree of freedom (multi-DoF) non-resonant electrostatic microelectromechanical systems (MEMS) gyroscope by considering the design constraints of commercially available low-cost and widely-used silicon-on-insulator multi-user MEMS...

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Detalles Bibliográficos
Autores principales: Bukhari, Syed Ali Raza, Saleem, Muhammad Mubasher, Khan, Umar Shahbaz, Hamza, Amir, Iqbal, Javaid, Shakoor, Rana Iqtidar
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7570342/
https://www.ncbi.nlm.nih.gov/pubmed/32957573
http://dx.doi.org/10.3390/mi11090862

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7570342/
https://www.ncbi.nlm.nih.gov/pubmed/32957573
http://dx.doi.org/10.3390/mi11090862

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