Ab initio study for molecular-scale adsorption, decomposition and desorption on AlN surfaces during MOCVD growth

Since AlGaN offers new opportunities for the development of the solid state ultraviolet (UV) luminescence, detectors and high-power electronic devices, the growth of AlN buffer substrate is concerned. However, the growth of AlN buffer substrate during MOCVD is regulated by an intricate interplay of...

Descripción completa

Detalles Bibliográficos
Autores principales: An, Jiadai, Dai, Xianying, Guo, Runqiu, Feng, Lansheng, Zhao, Tianlong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7576780/
https://www.ncbi.nlm.nih.gov/pubmed/33082396
http://dx.doi.org/10.1038/s41598-020-72973-w

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7576780/
https://www.ncbi.nlm.nih.gov/pubmed/33082396
http://dx.doi.org/10.1038/s41598-020-72973-w

Ejemplares similares