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Growth and Characterization of Ternary Hf(x)Ta(y)O(z) Films via Nitrogen-Infused Wet Oxidation
[Image: see text] Nitrogen-infused wet oxidation at different temperatures (400–1000 °C) was employed to transform tantalum–hafnia to hafnium-doped tantalum oxide films. High-temperature wet oxidation at 1000 °C marked an onset of crystallization occurring in the film, accompanied with the formation...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Chemical Society
2020
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7581075/ https://www.ncbi.nlm.nih.gov/pubmed/33110962 http://dx.doi.org/10.1021/acsomega.0c02120 |