Angle-Sensitive Detector Based on Silicon-On-Insulator Photodiode Stacked with Surface Plasmon Antenna

We present a pixel-level angle sensitive detector composed of silicon-on-insulator (SOI) photodiode (PD) stacked with a gold surface plasmon (SP) antenna to affect the direction of the incoming light. The surface plasmons are excited in the grating-type SP antenna and enhance the diffraction efficie...

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Detalles Bibliográficos
Autores principales: Nagarajan, Anitharaj, Hara, Shusuke, Satoh, Hiroaki, Panchanathan, Aruna Priya, Inokawa, Hiroshi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7582547/
https://www.ncbi.nlm.nih.gov/pubmed/32998219
http://dx.doi.org/10.3390/s20195543

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7582547/
https://www.ncbi.nlm.nih.gov/pubmed/32998219
http://dx.doi.org/10.3390/s20195543

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