An Experimental Study of Microchannel and Micro-Pin-Fin Based On-Chip Cooling Systems with Silicon-to-Silicon Direct Bonding

This paper describes an experimental study of the cooling capabilities of microchannel and micro-pin-fin based on-chip cooling systems. The on-chip cooling systems integrated with a micro heat sink, simulated power IC (integrated circuit) and temperature sensors are fabricated by micromachining and...

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Detalles Bibliográficos
Autores principales: Qiu, Yunlong, Hu, Wenjie, Wu, Changju, Chen, Weifang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7583888/
https://www.ncbi.nlm.nih.gov/pubmed/32992553
http://dx.doi.org/10.3390/s20195533

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7583888/
https://www.ncbi.nlm.nih.gov/pubmed/32992553
http://dx.doi.org/10.3390/s20195533

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