A Modeling and Feasibility Study of a Micro-Machined Microphone Based on a Field-Effect Transistor and an Electret for a Low-Frequency Microphone

Miniaturized capacitive microphones often show sensitivity degradation in the low-frequency region due to electrical and acoustical time constants. For low-frequency sound detection, conventional systems use a microphone with a large diaphragm and a large back chamber to increase the time constant....

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Detalles Bibliográficos
Autores principales: Shin, Kumjae, Kim, Chayeong, Sung, Min, Kim, Junsoo, Moon, Wonkyu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7584005/
https://www.ncbi.nlm.nih.gov/pubmed/32998343
http://dx.doi.org/10.3390/s20195554

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7584005/
https://www.ncbi.nlm.nih.gov/pubmed/32998343
http://dx.doi.org/10.3390/s20195554

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