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Intuitive Model of Surface Modification Induced by Cluster Ion Beams
[Image: see text] Topography development is one of the main factors limiting the quality of depth profiles during depth profiling experiments. One possible source of topography development is the formation of self-organized patterns due to cluster ion beam irradiation. In this work, we propose a sim...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Chemical
Society
2020
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7588020/ https://www.ncbi.nlm.nih.gov/pubmed/32314909 http://dx.doi.org/10.1021/acs.analchem.0c01219 |