Fast Fabrication of Complex Surficial Micro-Features Using Sequential Lithography and Jet Electrochemical Machining

This paper presents fabrication of complex surficial micro-features employing a cross-innovative hybrid process inspired from lithography and Jet-ECM. The process is referred here as mask electrolyte jet machining (MEJM). MEJM is a non-contact machining process which combines high resolution of lith...

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Detalles Bibliográficos
Autores principales: Wu, Ming, Kumar Saxena, Krishna, Guo, Zhongning, Qian, Jun, Reynaerts, Dominiek
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7589682/
https://www.ncbi.nlm.nih.gov/pubmed/33092295
http://dx.doi.org/10.3390/mi11100948

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7589682/
https://www.ncbi.nlm.nih.gov/pubmed/33092295
http://dx.doi.org/10.3390/mi11100948

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