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Automated Nanoscale Absolute Accuracy Alignment System for Transfer Printing

[Image: see text] The heterogeneous integration of micro- and nanoscale devices with on-chip circuits and waveguide platforms is a key enabling technology, with wide-ranging applications in areas including telecommunications, quantum information processing, and sensing. Pick and place integration wi...

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Detalles Bibliográficos
Autores principales: McPhillimy, John, Jevtics, Dimitars, Guilhabert, Benoit J. E., Klitis, Charalambos, Hurtado, Antonio, Sorel, Marc, Dawson, Martin D., Strain, Michael J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2020
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7590505/
https://www.ncbi.nlm.nih.gov/pubmed/33134883
http://dx.doi.org/10.1021/acsanm.0c02224