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Automated Nanoscale Absolute Accuracy Alignment System for Transfer Printing
[Image: see text] The heterogeneous integration of micro- and nanoscale devices with on-chip circuits and waveguide platforms is a key enabling technology, with wide-ranging applications in areas including telecommunications, quantum information processing, and sensing. Pick and place integration wi...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Chemical
Society
2020
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7590505/ https://www.ncbi.nlm.nih.gov/pubmed/33134883 http://dx.doi.org/10.1021/acsanm.0c02224 |