Demonstration of nearly pinhole-free epitaxial aluminum thin films by sputter beam epitaxy

Superconducting resonators with high quality factors have been fabricated from aluminum films, suggesting potential applications in quantum computing. Improvement of thin film crystal quality and removal of void and pinhole defects will improve quality factor and functional yield. Epitaxial aluminum...

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Detalles Bibliográficos
Autores principales: Law, Ka Ming, Budhathoki, Sujan, Ranjit, Smriti, Martin, Franziska, Thind, Arashdeep S., Mishra, Rohan, Hauser, Adam J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7591517/
https://www.ncbi.nlm.nih.gov/pubmed/33110189
http://dx.doi.org/10.1038/s41598-020-74981-2

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7591517/
https://www.ncbi.nlm.nih.gov/pubmed/33110189
http://dx.doi.org/10.1038/s41598-020-74981-2

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