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Demonstration of nearly pinhole-free epitaxial aluminum thin films by sputter beam epitaxy
Superconducting resonators with high quality factors have been fabricated from aluminum films, suggesting potential applications in quantum computing. Improvement of thin film crystal quality and removal of void and pinhole defects will improve quality factor and functional yield. Epitaxial aluminum...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7591517/ https://www.ncbi.nlm.nih.gov/pubmed/33110189 http://dx.doi.org/10.1038/s41598-020-74981-2 |