Fine-Structure Analysis of Perhydropolysilazane-Derived Nano Layers in Deep-Buried Condition Using Polarized Neutron Reflectometry

A large background scattering originating from the sample matrix is a major obstacle for fine-structure analysis of a nanometric layer buried in a bulk material. As polarization analysis can decrease undesired scattering in a neutron reflectivity (NR) profile, we performed NR experiments with polari...

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Detalles Bibliográficos
Autores principales: Akutsu-Suyama, Kazuhiro, Kira, Hiroshi, Miyata, Noboru, Hanashima, Takayasu, Miyazaki, Tsukasa, Kasai, Satoshi, Yamazaki, Dai, Soyama, Kazuhiko, Aoki, Hiroyuki
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7598669/
https://www.ncbi.nlm.nih.gov/pubmed/32987724
http://dx.doi.org/10.3390/polym12102180

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7598669/
https://www.ncbi.nlm.nih.gov/pubmed/32987724
http://dx.doi.org/10.3390/polym12102180

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