Effects of Methyl Terminal and Carbon Bridging Groups Ratio on Critical Properties of Porous Organosilicate Glass Films

Organosilicate glass-based porous low dielectic constant films with different ratios of terminal methyl to bridging organic (methylene, ethylene and 1,4-phenylene) groups are spin-on deposited by using a mixture of alkylenesiloxane with organic bridges and methyltrimethoxysilane, followed by soft ba...

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Detalles Bibliográficos
Autores principales: Vishnevskiy, Alexey S., Naumov, Sergej, Seregin, Dmitry S., Wu, Yu-Hsuan, Chuang, Wei-Tsung, Rasadujjaman, Md, Zhang, Jing, Leu, Jihperng, Vorotilov, Konstantin A., Baklanov, Mikhail R.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7601386/
https://www.ncbi.nlm.nih.gov/pubmed/33050395
http://dx.doi.org/10.3390/ma13204484

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7601386/
https://www.ncbi.nlm.nih.gov/pubmed/33050395
http://dx.doi.org/10.3390/ma13204484

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