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Innovative Method Using Adhesive Force for Surface Micromachining of Carbon Nanowall
The application of a carbon nanowall (CNW) via transfer is very demanding due to the unusual structure of vertically grown wall-shaped that easily collapses. In addition, direct growth on a device cannot obtain a precision-patterned shape because of the temperature limit of the photoresist (PR). The...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7601668/ https://www.ncbi.nlm.nih.gov/pubmed/33036269 http://dx.doi.org/10.3390/nano10101978 |