Micromachined Silicon Platform for Precise Assembly of 2D Multilayer Laue Lenses for High-Resolution X-ray Microscopy

We report on a developed micromachined silicon platform for the precise assembly of 2D multilayer Laue lenses (MLLs) for high-resolution X-ray microscopy. The platform is 10 × 10 mm(2) and is fabricated on ~500 µm thick silicon wafers through multiple steps of photolithography and deep reactive-ion...

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Detalles Bibliográficos
Autores principales: Xu, Wei, Xu, Weihe, Bouet, Nathalie, Zhou, Juan, Yan, Hanfei, Huang, Xiaojing, Lu, Ming, Zalalutdinov, Maxim, Chu, Yong S., Nazaretski, Evgeny
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7602850/
https://www.ncbi.nlm.nih.gov/pubmed/33076523
http://dx.doi.org/10.3390/mi11100939

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7602850/
https://www.ncbi.nlm.nih.gov/pubmed/33076523
http://dx.doi.org/10.3390/mi11100939

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