Shrinkage-Considered Mold Design for Improvement of Micro/Nano-Structured Optical Element Performance

Polymer shrinkage in nano-imprint lithography (NIL) is one of the critical issues that must be considered in order to produce a quality product. Especially, this condition should be considered during the manufacture of optical elements, because micro/nano-structured optical elements should be contro...

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Detalles Bibliográficos
Autores principales: Kim, Minsu, Oh, Eun Song, Kwak, Moon Kyu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7603191/
https://www.ncbi.nlm.nih.gov/pubmed/33080890
http://dx.doi.org/10.3390/mi11100941

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7603191/
https://www.ncbi.nlm.nih.gov/pubmed/33080890
http://dx.doi.org/10.3390/mi11100941

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