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Shrinkage-Considered Mold Design for Improvement of Micro/Nano-Structured Optical Element Performance
Polymer shrinkage in nano-imprint lithography (NIL) is one of the critical issues that must be considered in order to produce a quality product. Especially, this condition should be considered during the manufacture of optical elements, because micro/nano-structured optical elements should be contro...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7603191/ https://www.ncbi.nlm.nih.gov/pubmed/33080890 http://dx.doi.org/10.3390/mi11100941 |