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Out-of-plane surface patterning by subsurface processing of polymer substrates with focused ion beams
This work explores a new technique for the out-of-plane patterning of metal thin films prefabricated on the surface of a polymer substrate. This technique is based on an ion-beam-induced material modification in the bulk of the polymer. Effects of subsurface and surface processes on the surface morp...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Beilstein-Institut
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7653337/ https://www.ncbi.nlm.nih.gov/pubmed/33194518 http://dx.doi.org/10.3762/bjnano.11.151 |