Air Annealing Effect on Oxygen Vacancy Defects in Al-doped ZnO Films Grown by High-Speed Atmospheric Atomic Layer Deposition

In this study, aluminum-doped zinc oxide (Al:ZnO) thin films were grown by high-speed atmospheric atomic layer deposition (AALD), and the effects of air annealing on film properties are investigated. The experimental results show that the thermal annealing can significantly reduce the amount of oxyg...

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Detalles Bibliográficos
Autores principales: Hsu, Chia-Hsun, Geng, Xin-Peng, Wu, Wan-Yu, Zhao, Ming-Jie, Zhang, Xiao-Ying, Huang, Pao-Hsun, Lien, Shui-Yang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7663192/
https://www.ncbi.nlm.nih.gov/pubmed/33143026
http://dx.doi.org/10.3390/molecules25215043

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7663192/
https://www.ncbi.nlm.nih.gov/pubmed/33143026
http://dx.doi.org/10.3390/molecules25215043

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