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In-situ spatial and temporal electrical characterization of ZnO thin films deposited by atmospheric pressure chemical vapour deposition on flexible polymer substrates

A technique is presented for collecting data on both the spatial and temporal variations in the electrical properties of a film as it is deposited on a flexible substrate. A flexible printed circuit board substrate with parallel electrodes distributed across its surface was designed. Zinc oxide film...

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Detalles Bibliográficos
Autores principales: Jones, Alexander, Mistry, Kissan, Kao, Manfred, Shahin, Ahmed, Yavuz, Mustafa, Musselman, Kevin P.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7672091/
https://www.ncbi.nlm.nih.gov/pubmed/33203953
http://dx.doi.org/10.1038/s41598-020-76993-4