Stress and Refractive Index Control of SiO(2) Thin Films for Suspended Waveguides

Film stress and refractive index play an important role in the fabrication of suspended waveguides. SiO(2) waveguides were successfully fabricated on multiple substrates including Si, Ge, and Al(2)O(3) wafers; the waveguides were deposited using inductively coupled plasma chemical vapor deposition a...

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Detalles Bibliográficos
Autores principales: Wostbrock, Neal, Busani, Tito
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7690675/
https://www.ncbi.nlm.nih.gov/pubmed/33114056
http://dx.doi.org/10.3390/nano10112105

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7690675/
https://www.ncbi.nlm.nih.gov/pubmed/33114056
http://dx.doi.org/10.3390/nano10112105

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