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Stress and Refractive Index Control of SiO(2) Thin Films for Suspended Waveguides
Film stress and refractive index play an important role in the fabrication of suspended waveguides. SiO(2) waveguides were successfully fabricated on multiple substrates including Si, Ge, and Al(2)O(3) wafers; the waveguides were deposited using inductively coupled plasma chemical vapor deposition a...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2020
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7690675/ https://www.ncbi.nlm.nih.gov/pubmed/33114056 http://dx.doi.org/10.3390/nano10112105 |