A Low Spring Constant Piezoresistive Microcantilever for Biological Reagent Detection

This paper introduces a piezoresistive microcantilever with a low spring constant. The microcantilever was fabricated with titanium (Ti) as the piezoresistor, a low spring constant polyimide (PI) layer, and a thin silicon oxide (SiO(2)) layer as the top and bottom passive layers, respectively. Excel...

Descripción completa

Detalles Bibliográficos
Autores principales: Tian, Yuan, Zhao, Rui, Liu, Yi, Yu, Xiaomei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7697630/
https://www.ncbi.nlm.nih.gov/pubmed/33198100
http://dx.doi.org/10.3390/mi11111001

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7697630/
https://www.ncbi.nlm.nih.gov/pubmed/33198100
http://dx.doi.org/10.3390/mi11111001

Ejemplares similares