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A Low Spring Constant Piezoresistive Microcantilever for Biological Reagent Detection
This paper introduces a piezoresistive microcantilever with a low spring constant. The microcantilever was fabricated with titanium (Ti) as the piezoresistor, a low spring constant polyimide (PI) layer, and a thin silicon oxide (SiO(2)) layer as the top and bottom passive layers, respectively. Excel...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7697630/ https://www.ncbi.nlm.nih.gov/pubmed/33198100 http://dx.doi.org/10.3390/mi11111001 |