Advanced RuO(2) Thin Films for pH Sensing Application

RuO(2) thin films were prepared using magnetron sputtering under different deposition conditions, including direct current (DC) and radio frequency (RF) discharges, metallic/oxide cathodes, different substrate temperatures, pressures, and deposition times. The surface morphology, residual stress, co...

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Detalles Bibliográficos
Autores principales: Yao, Xinyue, Vepsäläinen, Mikko, Isa, Fabio, Martin, Phil, Munroe, Paul, Bendavid, Avi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7697712/
https://www.ncbi.nlm.nih.gov/pubmed/33187131
http://dx.doi.org/10.3390/s20226432

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7697712/
https://www.ncbi.nlm.nih.gov/pubmed/33187131
http://dx.doi.org/10.3390/s20226432

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