In Situ and Real-Time Nanoscale Monitoring of Ultra-Thin Metal Film Growth Using Optical and Electrical Diagnostic Tools

Continued downscaling of functional layers for key enabling devices has prompted the development of characterization tools to probe and dynamically control thin film formation stages and ensure the desired film morphology and functionalities in terms of, e.g., layer surface smoothness or electrical...

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Detalles Bibliográficos
Autores principales: Colin, Jonathan, Jamnig, Andreas, Furgeaud, Clarisse, Michel, Anny, Pliatsikas, Nikolaos, Sarakinos, Kostas, Abadias, Gregory
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7697846/
https://www.ncbi.nlm.nih.gov/pubmed/33182409
http://dx.doi.org/10.3390/nano10112225

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7697846/
https://www.ncbi.nlm.nih.gov/pubmed/33182409
http://dx.doi.org/10.3390/nano10112225

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