2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride

A 2D scanning micromirror with piezoelectric thin film aluminum nitride (AlN), separately used as actuator and sensor material, is presented. For endoscopic applications, such as fluorescence microscopy, the devices have a mirror plate diameter of 0.7 mm with a 4 mm(2) chip footprint. After an initi...

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Detalles Bibliográficos
Autores principales: Meinel, Katja, Melzer, Marcel, Stoeckel, Chris, Shaporin, Alexey, Forke, Roman, Zimmermann, Sven, Hiller, Karla, Otto, Thomas, Kuhn, Harald
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7698969/
https://www.ncbi.nlm.nih.gov/pubmed/33218078
http://dx.doi.org/10.3390/s20226599

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7698969/
https://www.ncbi.nlm.nih.gov/pubmed/33218078
http://dx.doi.org/10.3390/s20226599

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