Micro Electrochemical Milling of Micro Metal Parts with Rotating Ultrasonic Electrode

With the rapid development of MEMS, the demand for metal microstructure is increasing. Micro electrochemical milling technology (MECM) is capable of manufacturing micro metallic devices or components based on the principle of electrochemical anode dissolution. To improve the capacity of MECM, this p...

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Detalles Bibliográficos
Autores principales: Liu, Yong, Chen, Haoran, Wang, Shenghai, Wang, Kan, Li, Minghao, Peng, Tengfei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7699155/
https://www.ncbi.nlm.nih.gov/pubmed/33227991
http://dx.doi.org/10.3390/s20226617

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7699155/
https://www.ncbi.nlm.nih.gov/pubmed/33227991
http://dx.doi.org/10.3390/s20226617

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