A Resonant Pressure Microsensor with Temperature Compensation Method Based on Differential Outputs and a Temperature Sensor

This paper presents the analysis and characterization of a resonant pressure microsensor, which employs a temperature compensation method based on differential outputs and a temperature sensor. Leveraging a silicon-on-insulator (SOI) wafer, this microsensor mainly consists of a pressure-sensitive di...

Descripción completa

Detalles Bibliográficos
Autores principales: Xiang, Chao, Lu, Yulan, Yan, Pengcheng, Chen, Jian, Wang, Junbo, Chen, Deyong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7700299/
https://www.ncbi.nlm.nih.gov/pubmed/33233469
http://dx.doi.org/10.3390/mi11111022

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7700299/
https://www.ncbi.nlm.nih.gov/pubmed/33233469
http://dx.doi.org/10.3390/mi11111022

Ejemplares similares