Challenges in a Hybrid Fabrication Process to Generate Metallic Polarization Elements with Sub-Wavelength Dimensions

We report on the challenges in a hybrid sub-micrometer fabrication process while using three dimensional femtosecond direct laser writing and electroplating. With this hybrid subtractive and additive fabrication process, it is possible to generate metallic polarization elements with sub-wavelength d...

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Detalles Bibliográficos
Autores principales: Belle, Stefan, Goetzendorfer, Babette, Hellmann, Ralf
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7700300/
https://www.ncbi.nlm.nih.gov/pubmed/33266356
http://dx.doi.org/10.3390/ma13225279

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7700300/
https://www.ncbi.nlm.nih.gov/pubmed/33266356
http://dx.doi.org/10.3390/ma13225279

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