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Challenges in a Hybrid Fabrication Process to Generate Metallic Polarization Elements with Sub-Wavelength Dimensions
We report on the challenges in a hybrid sub-micrometer fabrication process while using three dimensional femtosecond direct laser writing and electroplating. With this hybrid subtractive and additive fabrication process, it is possible to generate metallic polarization elements with sub-wavelength d...
Autores principales: | Belle, Stefan, Goetzendorfer, Babette, Hellmann, Ralf |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7700300/ https://www.ncbi.nlm.nih.gov/pubmed/33266356 http://dx.doi.org/10.3390/ma13225279 |
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