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Large-Scale and Localized Laser Crystallization of Optically Thick Amorphous Silicon Films by Near-IR Femtosecond Pulses

Amorphous silicon ([Formula: see text]-Si) film present an inexpensive and promising material for optoelectronic and nanophotonic applications. Its basic optical and optoelectronic properties are known to be improved via phase transition from amorphous to polycrystalline phase. Infrared femtosecond...

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Detalles Bibliográficos
Autores principales: Bronnikov, Kirill, Dostovalov, Alexander, Cherepakhin, Artem, Mitsai, Eugeny, Nepomniaschiy, Alexander, Kulinich, Sergei A., Zhizhchenko, Alexey, Kuchmizhak, Aleksandr
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7700446/
https://www.ncbi.nlm.nih.gov/pubmed/33238502
http://dx.doi.org/10.3390/ma13225296