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Large-Scale and Localized Laser Crystallization of Optically Thick Amorphous Silicon Films by Near-IR Femtosecond Pulses
Amorphous silicon ([Formula: see text]-Si) film present an inexpensive and promising material for optoelectronic and nanophotonic applications. Its basic optical and optoelectronic properties are known to be improved via phase transition from amorphous to polycrystalline phase. Infrared femtosecond...
Autores principales: | Bronnikov, Kirill, Dostovalov, Alexander, Cherepakhin, Artem, Mitsai, Eugeny, Nepomniaschiy, Alexander, Kulinich, Sergei A., Zhizhchenko, Alexey, Kuchmizhak, Aleksandr |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7700446/ https://www.ncbi.nlm.nih.gov/pubmed/33238502 http://dx.doi.org/10.3390/ma13225296 |
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