Multiscale simulation of the focused electron beam induced deposition process

Focused electron beam induced deposition (FEBID) is a powerful technique for 3D-printing of complex nanodevices. However, for resolutions below 10 nm, it struggles to control size, morphology and composition of the structures, due to a lack of molecular-level understanding of the underlying irradiat...

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Detalles Bibliográficos
Autores principales: de Vera, Pablo, Azzolini, Martina, Sushko, Gennady, Abril, Isabel, Garcia-Molina, Rafael, Dapor, Maurizio, Solov’yov, Ilia A., Solov’yov, Andrey V.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7705715/
https://www.ncbi.nlm.nih.gov/pubmed/33257728
http://dx.doi.org/10.1038/s41598-020-77120-z

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7705715/
https://www.ncbi.nlm.nih.gov/pubmed/33257728
http://dx.doi.org/10.1038/s41598-020-77120-z

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