Electron beam-induced deposition of platinum from Pt(CO)(2)Cl(2) and Pt(CO)(2)Br(2)

Two platinum precursors, Pt(CO)(2)Cl(2) and Pt(CO)(2)Br(2), were designed for focused electron beam-induced deposition (FEBID) with the aim of producing platinum deposits of higher purity than those deposited from commercially available precursors. In this work, we present the first deposition exper...

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Detalles Bibliográficos
Autores principales: Mahgoub, Aya, Lu, Hang, Thorman, Rachel M, Preradovic, Konstantin, Jurca, Titel, McElwee-White, Lisa, Fairbrother, Howard, Hagen, Cornelis W
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2020
Materias:
Full Research Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7705861/
https://www.ncbi.nlm.nih.gov/pubmed/33299738
http://dx.doi.org/10.3762/bjnano.11.161

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7705861/
https://www.ncbi.nlm.nih.gov/pubmed/33299738
http://dx.doi.org/10.3762/bjnano.11.161

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