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Inscribing diffraction grating inside silicon substrate using a subnanosecond laser in one photon absorption wavelength
Using focused subnanosecond laser pulses at [Formula: see text] wavelength, modification of silicon into opaque state was induced. While silicon exhibits one-photon absorption at this wavelength, the modification was induced inside [Formula: see text] -thick silicon substrate without damaging top or...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2020
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7722872/ https://www.ncbi.nlm.nih.gov/pubmed/33293586 http://dx.doi.org/10.1038/s41598-020-78564-z |