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Guided-Mode Resonance-Based Relative Humidity Sensing Employing a Planar Waveguide Structure

In this paper, we present a new type of guided-mode resonance (GMR)-based sensor that utilizes a planar waveguide structure (PWS). We employed a PWS with an asymmetric three-layer waveguide structure consisting of substrate/Au/photoresist. The ellipsometric characterization of the structure layers,...

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Detalles Bibliográficos
Autores principales: Urbancova, Petra, Chylek, Jakub, Hlubina, Petr, Pudis, Dusan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7731120/
https://www.ncbi.nlm.nih.gov/pubmed/33261084
http://dx.doi.org/10.3390/s20236788