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Guided-Mode Resonance-Based Relative Humidity Sensing Employing a Planar Waveguide Structure
In this paper, we present a new type of guided-mode resonance (GMR)-based sensor that utilizes a planar waveguide structure (PWS). We employed a PWS with an asymmetric three-layer waveguide structure consisting of substrate/Au/photoresist. The ellipsometric characterization of the structure layers,...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7731120/ https://www.ncbi.nlm.nih.gov/pubmed/33261084 http://dx.doi.org/10.3390/s20236788 |