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Redeposition-Free Deep Etching in Small KY(WO(4))(2) Samples
KY(WO(4))(2) is a promising material for on-chip laser sources. Deep etching of small KY(WO(4))(2) samples in combination with various thin film deposition techniques is desirable for the manufacturing of such devices. There are, however, several difficulties that need to be overcome before deep etc...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7760692/ https://www.ncbi.nlm.nih.gov/pubmed/33255494 http://dx.doi.org/10.3390/mi11121033 |