A High Q-Factor Outer-Frame-Anchor Gyroscope Operating at First Resonant Mode

Disc gyroscope manufactured through microelectromechanical systems (MEMS) fabrication processes becomes one of the most critical solutions for achieving high performance. Some reported novel disc constructions acquire good performance in bias instability, scale factor nonlinearity, etc. However, ant...

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Detalles Bibliográficos
Autores principales: Jiang, Bo, Su, Yan, Liu, Guowen, Zhang, Lemin, Liu, Fumin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7760768/
https://www.ncbi.nlm.nih.gov/pubmed/33271830
http://dx.doi.org/10.3390/mi11121071

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7760768/
https://www.ncbi.nlm.nih.gov/pubmed/33271830
http://dx.doi.org/10.3390/mi11121071

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