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A High Q-Factor Outer-Frame-Anchor Gyroscope Operating at First Resonant Mode
Disc gyroscope manufactured through microelectromechanical systems (MEMS) fabrication processes becomes one of the most critical solutions for achieving high performance. Some reported novel disc constructions acquire good performance in bias instability, scale factor nonlinearity, etc. However, ant...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7760768/ https://www.ncbi.nlm.nih.gov/pubmed/33271830 http://dx.doi.org/10.3390/mi11121071 |